Nanochem Hcx Environmental Equipment & Supplies

1 equipment items found

NANOCHEM - HCX - Inert Gas Purifier

Distributed by:Chrysalis Scientific Technologies Inc. based inBurlington, ONTARIO (CANADA)

NANOCHEM HCX Purifiers are designed to remove trace hydrocarbons from inert gases and hydrogen. An example of a process sensitive to hydrocarbon contamination is DUV lithography. Deposition of carbon-based films from purge gas contaminants on the optical components decreases light throughput and negatively affects the patterning process. NANOCHEM HCX purification medium, the active component in ...

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